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Comments by "" (@ntabile) on "EUV Lithography. But With a Free Electron Laser" video.
On the other hand, an Ion Implant with an Implanter will be use after Film deposition.This time its Ion being deposited/doped in the trenches and in High Vacuum state and in numerous steps too. Litho->Film->Implant->Etch. Repeat until desired step is completed. Oops, I didn't put the clean or strip steps yet in between those steps as it depends on type of process required or designed.
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