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Grak70
Asianometry
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Comments by "Grak70" (@Grak70) on "A Deep Dive Into Canon’s Nanoimprint Lithography" video.
Even though you can look through the template, overlay is not a problem that’s going to go away because rather than adjust the image of the mask (which can scale linearly), changing the shape of the imprint template is limited by the modulus response of the template: a decidedly non-linear process. This means when you apply a correction to say, X-mag, different areas of the template will respond completely differently. Nano imprint is cute for some niche applications but it will never be used to print anything at the bleeding edge where its resolution capabilities shine. And on top of that, it’s slower than molasses in January.
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This tech is cute but it will never replace projection lithography. Too slow, takes too much fab floor space, and the overlay issues inherent to a rigid template are completely intractable.
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