Comments by "TheEVEInspiration" (@TheEVEInspiration) on "ASML's High-NA and Hyper-NA EUV: An Update" video.

So customers do not want bigger masks (likely due to cost) and end up paying for a far more costly tool chain in return. Penny wise, pound foolish if you ask me.
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@kazedcat That is so, but as the video explains, each of those tools is highly specialized for just this process. It has a limited reusability in that sense as well. Plus there are changing demands for the masks as a result as well + new problems that designs need to take into account. It all adds up. A less complex solution / fix the root of the problem approach looks better to me.
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