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Martinit0
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Comments by "Martinit0" (@Martinit0) on "Carl Zeiss, Explained: Germany’s Semiconductor Optics Master" video.
Another German company involved in that: Trumpf Laser. I'm not sure which is more crazy, the Zeiss projection system or the source.
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I wouldn't say "discovered immersion lithography". It's more like they decided to implement immersion optics in lithography. Immersion optics was state of the art many decades before in microscopy. Microscopy being a major line of business of Zeiss - they do offer complete microscopes and also just the optics (i.e. objective lenses). Those lenses are designed and sold as either regular air-operated or as (oil or water) immersion lenses.
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