Comments by "Martinit0" (@Martinit0) on "The Early Years at TSMC" video.

  1. The more x-ray the radiation the less it interacts with surface material (your photoresist). So it will require even higher optical power to run a litho process. Also the optical path will become very elongated (vs. folded in a compact space) as mirrors have to have very low angle of incidence, as previous poster mentioned. Basically like synchrotron beamlines.
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