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Martinit0
Asianometry
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Comments by "Martinit0" (@Martinit0) on "How Carl Zeiss Crafts Optics for a $150 Million EUV Machine" video.
There must definitively be a clear and very well defined interface, otherwise you'd never get a working system. Typically you can expect strict specifications and acceptance testing of each unit.
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Newport, Laser 2000
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Sam Zeelof can though: https://youtu.be/Nxz_ENnmgtI
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The IP
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What do you mean by "stack them up"? The light has to go from one mirror to the next, so you have to zig zag somehow. Moreover, the angle of incidence (at what angle the light bounce off the mirror) has to be within a certain range for the multilayer to work properly.
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